Therma-Wave Wins Fab Expansion Repeat Metrology Orders

"We are pleased to announce these major follow-on orders for ouradvanced Opti-Probe tools which expand upon this customer'ssignificant installed base of Therma-Wave metrology solutions. Ourleading edge tools provide seamless tool-to-tool and fab-to-fabmatching and are backed by a proven field and applications supportteam with resources located world-wide. These orders and deliveriesreflect our customer's ongoing confidence in expanding theirdeployment of Therma-Wave metrology solutions to support theirfront-end and back-end metrology applications throughout the fab,"commented Brian Renner, vice president of sales at Therma-Wave.

About Therma-Wave, Inc.

Since 1982, Therma-Wave, Inc. has been revolutionizing processcontrol metrology systems through innovative proprietary products andtechnologies. The Company is a world-wide leader in the development,manufacture, marketing and service of process control metrologysystems used in the manufacture of semiconductors. Therma-Wavecurrently offers leading-edge products to the semiconductormanufacturing industry for the measurement of transparent andsemi-transparent thin films; for the measurement of criticaldimensions and profile of IC features; and for the monitoring of ionimplantation and activation processes. Further information aboutTherma-Wave, Inc., is available from the Company's web site at:www.thermawave.com.

Safe Harbor Statement

This press release contains forward-looking statements thatinvolve risks and uncertainties, as well as assumptions that, if theydo not fully materialize or prove incorrect, could cause our actualresults to differ materially from those expressed or implied by suchforward-looking statements. Such forward-looking statements includeour ability to convert these orders into revenue. Factors that couldcause actual results to differ materially from the forward-lookingstatements include the cyclicality of our business, the loss of one ormore large customers, the cancellation of one or more orders by ourcustomers, our ability to protect our intellectual property, ourability to successfully compete against larger companies, our abilityto access additional capital in the future, our ability to develop newand advanced products in the future, our ability to attract and retainkey personnel, our ability to receive supplies from single sourcesuppliers, business decisions by third parties, that are out of ourcontrol, disruptions at our manufacturing facilities and generalpolitical, economic and stock market conditions and events, bothdomestically and internationally. These factors and others aredescribed in more detail in our public reports filed with theSecurities and Exchange Commission, such as those discussed in the"Factors Affecting Future Results" section of our Annual Report onForm 10-K for the fiscal year ended April 2, 2006, all quarterlyreports on Form 10-Q for the following fiscal quarters, all subsequentcurrent reports on Form 8-K and our prior press releases. Allforward-looking statements in this press release are based oninformation available to us as of the date hereof, and we assume noduty to update these forward-looking statements.

Note: Opti-Probe is registered trademark of Therma-Wave, Inc.