Axcelis Achieves #1 Market Share in Ion Implantation for Third Straigh

    Business Editors/Technology Editors

    BEVERLY, Mass.--(BUSINESS WIRE)--April 13, 2005--Axcelis Technologies Inc. (NASDAQ: ACLS), has again achieved the number one position in the $1.265 billion ion implantation market according to a new report for the calendar year 2004 issued by market researcher Gartner Dataquest. Axcelis and its joint venture Sumitomo Eaton Nova (SEN) led the ion implantation industry with 38.4% market share. The company has held the number one share position for three consecutive years, and eight of the past ten. Axcelis offers a comprehensive suite of products, including both multi and single wafer platforms designed to meet the requirements for both present and future technology nodes.
    "Axcelis' implant product portfolio continued to be the leading choice for chipmakers worldwide in 2004. We have an ongoing commitment to help customers reach higher levels of productivity and capital efficiency with each new technology generation," said Mike Luttati, chief operating officer of Axcelis. "This has resulted in Axcelis' leadership position which we intend to leverage with our new Optima(TM) product platform."
    Earlier this year, Axcelis unveiled the Optima(TM) single wafer ion implant series. In contrast to the other single wafer implanter products currently on the market, Axcelis designed the entire Optima platform as a simple, cost-effective approach to implantation needs for the 65nm technology node and beyond. Capable of addressing the entire range of implant energies, the platform will encompass three systems: the Optima MD for low energy, mid-dose implant applications, and two additional systems for high-dose and high-energy applications. The Optima MD has already won acceptance at both leading logic and memory manufacturers worldwide. This platform, which joins Axcelis' market leading multi-wafer Paradigm and Ultra implant systems, positions Axcelis as the only supplier able to provide customers with a total solution for their implant needs.

    About Axcelis Technologies, Inc.

    Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

    Forward-Looking Statements

    This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Product manufacturing and delivery issues, customer order push-outs or cancellations and product performance could cause actual results to differ materially from those currently anticipated as expressed in this press release. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission.

--30--MW/bo*

CONTACT: Company Contact: Axcelis Technologies, Inc. Maureen Hart, 978-787-4266 maureen.hart@axcelis.com or Investor Contact: Axcelis Technologies, Inc. James Kawski, 978-787-4000 investor.relations@axcelis.com or Agency Contact: Loomis Group Stacy Grisinger, 617-638-0022 grisingers@loomisgroup.com

KEYWORD: MASSACHUSETTS INDUSTRY KEYWORD: HARDWARE MANUFACTURING SOURCE: Axcelis Technologies Inc.

Copyright Business Wire 2005